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Thin RF sputtered and thermal Ta2O5 on Si for high density DRAM application

Materials ScienceElectrical EngineeringEngineeringRf SemiconductorNanoelectronicsThermal Ta2o5Oxide ElectronicsApplied PhysicsSemiconductor Device FabricationElectronic PackagingThin FilmsMicroelectronicsSilicon On InsulatorThin Rf