Publication | Closed Access
The effect of ion species on bombardment induced topography during ion etching of silicon
11
Citations
5
References
1984
Year
Ion ImplantationIon EtchingEngineeringPhysicsMicrofabricationSurface ScienceApplied PhysicsIon SpeciesSemiconductor Device FabricationIon EmissionSilicon On InsulatorMicroelectronicsPlasma Etching
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