Applied Surface Science · 2009 · 41 citations · 10 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesDisplay TechnologiesEtching ProcessesLaser Surface ProcessingLaser-plasma InteractionsOptoelectronic DevicesThin Film EtchingDevice FabricationIndium Tin Oxide Thin FilmsLaser Surface EtchingPlasma Display PanelsPlasma EtchingSurface EtchingTin-doped Indium Oxide
10
Increase in laser repetition rate by spectral selection
T. Sizer · IEEE Journal of Quantum Electronics · 1989 · 77 citations
Natural Sciences, Physics, Optics +10