Thin Solid Films · 1992 · 29 citations · 27 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface EngineeringThin FilmsChemical Vapor DepositionThin-film DepositionChemical Vapor Deposition MaterialsPlasma DepositionPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor Deposition
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