Effect of N2-gas flow rates on the structures and properties of copper nitride films prepared by reactive DC magnetron sputtering

Copper nitride and tin nitride thin films for write-once optical recording media

Toshiro Maruyama, Tomonori Morishita · Applied Physics Letters · 1996 · 207 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Cu₃N Thin Film for a New Light Recording Media

K. Umeda, Akira Tasaki · Japanese Journal of Applied Physics · 1990 · 172 citations

Natural Sciences, Materials Engineering, Materials Science +16

Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering

L. Maya · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +14

Thermal stability of copper nitride films prepared by rf magnetron sputtering

Z.Q Liu, W.J Wang, T.M Wang et al. · Thin Solid Films · 1998 · 126 citations

Natural Sciences, Materials Engineering, Materials Science +12

Structural and optical characterization of Cu3N films prepared by reactive RF magnetron sputtering

Kwang Joo Kim, Jong Hyuk Kim, Ji Hoon Kang · Journal of Crystal Growth · 2001 · 124 citations

Natural Sciences, Materials Engineering, Materials Science +14