Concepedia

Thermal stability of copper nitride films prepared by rf magnetron sputtering

Z.Q Liu, W.J Wang, T.M Wang, Sheng D. Chao, Shen Zheng

Thin Solid Films · 1998 · 126 citations · 6 references

DOI

Concepts

References

6

Constitution of Binary Alloys

Max Hansen, K. Anderko, H. W. Salzberg · Journal of The Electrochemical Society · 1958 · 14.8K citations

, , +8

Cu<sub>3</sub>N Thin Film for a New Light Recording Media

K. Umeda, Akira Tasaki · Japanese Journal of Applied Physics · 1990 · 172 citations

, , +16

Copper nitride thin films prepared by radio-frequency reactive sputtering

Toshiro Maruyama, Tomonori Morishita · Journal of Applied Physics · 1995 · 148 citations · Full text

, , +17

Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering

L. Maya · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 139 citations

, , +14

Heteroepitaxial growth of Cu3N thin films

S. Terada, Hirohisa Tanaka, K. Kubota · Journal of Crystal Growth · 1989 · 63 citations

, , +11