Publication | Closed Access
Thermal stability of copper nitride films prepared by rf magnetron sputtering
126
Citations
6
References
1998
Year
Materials ScienceMaterials EngineeringAluminium NitrideBoron NitrideEngineeringPhysicsNanoelectronicsApplied PhysicsCopper Nitride FilmsRf MagnetronThin FilmsThermal StabilityThin Film Processing
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