Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution

Abstract

Recent developments in cluster ion beams for secondary ion mass spectrometry (SIMS) have enabled the realization of molecular depth profiling and mass imaging of organic and biological materials. Massive Ar cluster beams present reduced surface damage and fragmented ion generation and are suitable as primary beams for SIMS. We recently obtained a finely focused massive 1.2-µm-diameter cluster ion beam and combined it with an orthogonal acceleration time-of-flight mass spectrometer. A mesh pattern of a phospholipid thin film was clearly reproduced in the mass images of molecular ions with a measurement time of 100 s.