Chemical and mechanical balance in polishing of electronic materials for defect-free surfaces

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Technological Advances in Fine Abrasive Processes

R. Komanduri, D.A. Lucca, Yukako Tani · CIRP Annals · 1997 · 310 citations

Engineering, Materials Engineering, Materials Science +14

Observations on Polishing and Ultraprecision Machining of Semiconductor Substrate Materials

V.C. Venkatesh, Ichiro INASAKI, H.K. Toenshof et al. · CIRP Annals · 1995 · 97 citations

Engineering, Manufacturing Engineering, Materials Science +14

Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots

Chien-Hung Ho, Kan-Ping Chin, Chii-Rong Yang et al. · Sensors and Actuators A Physical · 2002 · 75 citations

Engineering, Manufacturing Engineering, Biomaterials +7

Anisotropic Etching of SiC

Mikael Syväjärvi, Rositza Yakimova, Erik Janzén · Journal of The Electrochemical Society · 2000 · 39 citations

Engineering, Materials Engineering, Materials Science +17