Observations on Polishing and Ultraprecision Machining of Semiconductor Substrate Materials - Concepedia

Concepedia

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Observations on Polishing and Ultraprecision Machining of Semiconductor Substrate Materials

96

Citations

15

References

1995

Year

V.C. Venkatesh, Ichiro INASAKI, H.K. Toenshof, Takeo Nakagawa, Ioan D. Marinescu

Materials ScienceEngineeringMaterial ProcessingMicrofabricationMaterial MachiningTool WearApplied PhysicsUltraprecision MachiningSurface PolishingAbrasive MachiningMicrostructure

References

	Year	Citations

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