Concepedia

Direct current reactive sputtering of aluminium

B. Goranchev, V. Orlinov, V. Tsaneva, I. Petrov

Thin Solid Films · 1978 · 16 citations · 4 references

DOI

Concepts

References

4

Phase Changes in Thin Reactively Sputtered Alumina Films

R. G. Frieser · Journal of The Electrochemical Society · 1966 · 67 citations

, , +16

A spectroscopic investigation of the reactive sputtering of aluminium

András Stirling, W. D. Westwood · Thin Solid Films · 1971 · 50 citations

, , +11

Interface Properties of Al<sub>2</sub>O<sub>3</sub>-Ge Structure and Characteristics of Al<sub>2</sub>O<sub>3</sub>-Ge MOS Transistors

Shigeki Iwauchi, Toshio Tanaka · Japanese Journal of Applied Physics · 1971 · 29 citations

, , +17

D.C. cathode sputtering: influence of the oxygen content in the gas flow on the discharge current

B. Goranchev, V. Orlinov · Thin Solid Films · 1976 · 29 citations

, , +11