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Characterization of growth behavior and structural properties of TiO2 thin films grown on Si(1 0 0) and Si(1 1 1) substrates

Materials ScienceGrowth BehaviorStructural PropertiesEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsTio2 Thin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film Processing