Concepedia

Dielectric properties of SiOx like films deposited from TMS/O2 mixture in low pressure microwave plasma

M. Kihel, Salah Sahli, A. Zenasni, Patrice Raynaud, Y. Segui

Vacuum · 2014 · 17 citations · 33 references

DOI

Concepts

References

33

Dielectric relaxation in solids

A.K. Jonscher · Journal of Physics D Applied Physics · 1999 · 5.3K citations

, , +17

Dielectric relaxation in solids

H.K. Henisch · Materials Research Bulletin · 1984 · 3.4K citations

, , +17

Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane

A. Grill, V. Patel · Journal of Applied Physics · 1999 · 170 citations

, , +17

Characterization of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection

Hyeong Joon Kim, Qingyi Shao, Yoon-Hae Kim · Surface and Coatings Technology · 2003 · 70 citations

, , +16

Correlation of morphology and barrier properties of thin microwave plasma polymer films on metal substrate

Violeta Barranco, Jean‐François Carpentier, Guido Grundmeier · Electrochimica Acta · 2004 · 56 citations

, , +16