Concepedia

Yoon-Hae Kim

YK

3

Publications

352

Citations

3

H-Index

2001

Active since

Affiliations

Seoul National University(Current)

Jusung Engineering (South Korea)

Yoon-Hae Kim is an author at Seoul National University specializing in thin films, engineering, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryElectronic MaterialsElectrical InsulationNanomaterialsMicroelectronics

Publications per year

2001–2003

3

Publications

3

Infrared spectroscopy study of low-dielectric-constant fluorine-incorporated and carbon-incorporated silicon oxide films

Yoon-Hae Kim, Moo Sung Hwang, Hyeong Joon Kim et al. · Journal of Applied Physics · 2001 · 178 citations

Engineering, Sioc Film, Thin Film Process Technology +16

Origin of low dielectric constant of carbon-incorporated silicon oxide film deposited by plasma enhanced chemical vapor deposition

Jin Yong Kim, Moo Sung Hwang, Yoon-Hae Kim et al. · Journal of Applied Physics · 2001 · 104 citations

Optical Materials, Engineering, Thin Film Process Technology +18

Characterization of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection

Hyeong Joon Kim, Qingyi Shao, Yoon-Hae Kim · Surface and Coatings Technology · 2003 · 70 citations

Materials Science, Electrical Engineering, Engineering +9

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