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Auger electron spectroscopy rotational depth profiling of Ni/Cr multilayers using O2+ and Ar+ ions

Materials ScienceSurface CharacterizationEngineeringAtomic Emission SpectroscopyElectron SpectroscopyNatural SciencesSpectroscopySurface ScienceApplied PhysicsSurface AnalysisAtomic PhysicsNi/cr MultilayersMicroanalysisChemistryAr+ Ions