Concepedia

Publication | Closed Access

All hot wire CVD TFTs with high deposition rate silicon nitride (3nm/s)

DOI

16

Citations

22

References

2008

Year

R.E.I. Schropp, Shogo Nishizaki, Z.S. Houweling, V. Verlaan, C.H.M. van der Werf, Hiroyoshi Matsumura
Solid-State Electronics

References

YearCitations

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