Review of Scientific Instruments · 2012 · 39 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyThin FilmsRadiographic ImagingThin Film Optical PropertiesX-ray DetectionX-ray DiffractionX-ray OpticsDiffraction-limited ImagingDiffraction-limited PerformanceDiffraction-limited ResolutionFresnel Zone PlatesPoint Spread FunctionTomographic ReconstructionX-ray Imaging OpticsX-ray Imaging Physics
A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi(2) and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.
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