Publication | Closed Access

Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method

Materials ScienceEngineeringMicromachinesMicrofabricationNanomaterialsNanotechnologyMillimeter Scale NanochannelsApplied PhysicsNano Electro Mechanical SystemMicroscale SystemNanofabricationMicromachiningMicrofluidicsNano Scale