Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures

Katsuhiro Yokota, Tomoyuki Yamada, Fumiyoshi Miyashita, Kiyohito Hirai, Hiromichi Takano, Masao Kumagai

Thin Solid Films · 1998 · 21 citations · 6 references

Concepts

References

6