Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures - Concepedia

Concepedia

Publication | Closed Access

Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures

21

Citations

6

References

1998

Year

Katsuhiro Yokota, Tomoyuki Yamada, Fumiyoshi Miyashita, Kiyohito Hirai, Hiromichi Takano, Masao Kumagai

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsApplied PhysicsTitanium-oxide FilmsThin FilmsChemical Vapor DepositionThin Film ProcessingMaterial Preparation

References

	Year	Citations

Page 1