Katsuhiro Yokota

Resistivities of titanium nitride films prepared onto silicon by an ion beam assisted deposition method

Katsuhiro Yokota, Kazuhiro Nakamura, Tomohiko Kasuya et al. · Journal of Physics D Applied Physics · 2004 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +17

Compositional structure of dual TiNO layers deposited on SUS 304 by an IBAD technique

Katsuhiro Yokota, Kazuhiro Nakamura, Tomohiko Kasuya et al. · Surface and Coatings Technology · 2002 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +8

Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures

Katsuhiro Yokota, Tomoyuki Yamada, Fumiyoshi Miyashita et al. · Thin Solid Films · 1998 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +13

Interactions between arsenic and boron implanted in silicon during annealing

Katsuhiro Yokota, Masatoshi Ochi, Takashi Hirao et al. · Journal of Applied Physics · 1991 · 17 citations

Engineering, Materials Engineering, Materials Science +16

Relationship between etch pit densities and oxygen concentrations on CdTe

Katsuhiro Yokota, Toshiharu Yoshikawa, Sigeru Inano et al. · Applied Physics Letters · 1990 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +15