Effects on ellipsometric parameters caused by heat treatment of silicon (111) surface - Concepedia

Concepedia

Publication | Open Access

Effects on ellipsometric parameters caused by heat treatment of silicon (111) surface

DOI Full Paper Access

21

Citations

9

References

1977

Year

Shinji Kono, L.J. Hanekamp, A. van Silfhout

Surface Science

Materials ScienceSurface CharacterizationEngineeringSurface AnalysisSurface ScienceApplied PhysicsSurface EngineeringEllipsometric ParametersThermodynamicsHeat TransferSilicon On InsulatorThermal EngineeringHeat TreatmentSurface Processing

References

	Year	Citations

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