IEEJ Transactions on Sensors and Micromachines · 2007 · 15 citations · 3 references
Natural SciencesPhysicsMetrologyPhotonicsPlasma PhysicsParticle SizePlasma DiagnosticsRadiation InstrumentationUltraviolet InstrumentationIn Situ MeasurementNanoparticle Size AnalysisParticle Count MeasurementParticle Size CharacterizationParticle Size Distribution MeasurementParticle Size EstimationParticle Size MeasurementParticle Size Spectrometry
We have developed high-sensitivity in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes and the constituent element content of particles with 10% accuracy.
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