Publication | Closed Access
High Rate Deposition of Iron Films by Sputtering from Two Facing Targets
37
Citations
1
References
1977
Year
Materials ScienceMaterials EngineeringHigh Rate DepositionEngineeringPhysicsMicrofabricationTarget FabricationSurface ScienceApplied PhysicsIron FilmsThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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