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A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography

Geometric ModelingEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNatural SciencesFabrication TechniqueApplied PhysicsComputer-aided DesignLevel Set ApproachUnified ModelMicroelectronicsPlasma Etching3D PrintingMultiscale Modeling