Synthesis and structure of smooth, superhard TiN/SiNx multilayer coatings with an equiaxed microstructure

Yu-Hsia Chen, Kitty W. Lee, Wen‐An Chiou, Yip-Wah Chung, L. M. Keer

Surface and Coatings Technology · 2001 · 82 citations · 12 references

Concepts

References

12