Publication | Closed Access
Synthesis and structure of smooth, superhard TiN/SiNx multilayer coatings with an equiaxed microstructure
82
Citations
12
References
2001
Year
Materials ScienceMaterials EngineeringThermal Spray CoatingEngineeringSurface ScienceApplied PhysicsSurface ProcessingEquiaxed MicrostructureMicrostructureDepth-graded Multilayer Coating
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