Microsystem Technologies · 2009 · 62 citations · 27 references
EngineeringMechanical EngineeringBiomechanicsFluid DynamicsFluid MechanicsElectrostatic ActuationElectrostatic ActuatorsBeam MechanicsElectrostatic Actuation ModelingElectrostatic Microelectromechanical SystemsMicrobeam DesignMicrobeam Theory
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