Concepedia

Publication | Closed Access

Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device

DOI

33

Citations

7

References

2012

Year

T. Lalinský, P. Hudek, G. Vanko, J. Dzuba, Vladimı́r Kutiš, R. Srnánek, Pavlina Choleva, Martin Vallo, Milan Držík, L. Matay,
Microelectronic Engineering

References

YearCitations

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