On the characterization of a RF parallel plate discharge

Abstract

A parallel plate discharge, operated in argon in the pressure range p=0.001 to 1 mbar, was investigated with special interest on the mechanism of power deposition and on the electron energy distribution function (EEDF). Various diagnostic methods were used in combination in order to obtain a sufficient characterization of the discharge. The predominant channel of power flux was found to change with increasing pressure from Joule-type heating in the plasma bulk to heating by beam-like secondary electrons emitted by the powered electrode. Measured EEDFS differ from Maxwellians and change their shape along the discharge axis.