Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation - Concepedia

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Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation

14

Citations

17

References

2008

Year

Yasuhiro Saito, Shinya Okamoto, Hiroyuki Inomata, Junji Kurachi

Applied Surface Science

Materials ScienceGlass-ceramicRate ChangeChemical EngineeringEngineeringMicrofabricationAluminosilicate GlassGlass MaterialPlasma EtchingHf AcidMicrostructure

References

	Year	Citations

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