Applied Physics Letters · 2003 · 83 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsPhotonicsSemiconductor MaterialsAtomic Layer DepositionOptical Properties Of SolidsOptoelectronic MaterialsPhotonic CrystalsPhotonic MaterialsSemiconductor NanomaterialsAtomic Layer Deposition PrecursorsAtomically Thin SemiconductorsNanostructured Optoelectronic MaterialsPhotoluminescencePhotoluminescence SpectroscopyZinc Oxide Nanostructures
The infiltration of three-dimensional opal structures has been investigated by atomic layer deposition. Demonstrations using ZnS:Mn show that filling fractions >95% can be achieved and that the infiltrated material is of high-quality crystalline material as assessed by photoluminescence measurements. These results demonstrate a flexible and practical pathway to attaining high-performance photonic crystal structures and optical microcavities.
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On-chip natural assembly of silicon photonic bandgap crystals
Yurii A. Vlasov, Xiang-Zheng Bo, J. C. Sturm et al. · Nature · 2001 · 1.6K citations