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Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD

Materials ScienceMaterials EngineeringEngineeringDiffusion ResistanceFlexible ElectronicsSurface ScienceApplied PhysicsActive PackagingPrinted ElectronicsSiox Diffusion BarriersElectronic PackagingChemical Vapor DepositionFlexible Packaging Materials