Measurements of thermal conductivity of diamond films by photothermal deflection technique

Abstract

The photothermal deflection technique has been used for contactless measurements of the thermal conductivity of thin polycrystalline diamond films grown in a dc arc discharge in different CH4/H2 mixtures. The thermal conductivity correlates inversely with amorphous sp2 carbon content in the films. Values of thermal conductivity in the range 2–5 W/cm K were obtained for ∼10-μm-thick diamond films deposited from gas mixtures containing methane percentages varying from 3% to 9%.