High sensitivity analysis of atmospheric gas elements

Quantitative analysis of carbon in liquid-encapsulated Czochralski GaAs

Yoshikazu Homma, Yoshikazu Ishii, Takashi Kobayashi et al. · Journal of Applied Physics · 1985 · 60 citations

Natural Sciences, Chemistry, Materials Science +10

Analysis of carbon and oxygen in GaAs using a secondary ion mass spectrometer equipped with a 20 K-cryopanel pumping system

Yoshikazu Homma, Yoshikazu Ishii · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 24 citations

Natural Sciences, Chemistry, Electrical Engineering +16

Improved quantification and detection limits for oxygen analysis in Al<i>x</i>Ga1−<i>x</i> As/GaAs multilayers with secondary ion mass spectroscopy

M. Meuris, W. Vandervorst, G. Borghs · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 23 citations

Natural Sciences, Chemistry, Materials Science +17

The sources for contaminants in the trace analysis of carbon in GaAs by secondary ion mass spectrometry

Junji Kobayashi, Masato Nakajima, Koichi Ishida · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 19 citations

Natural Sciences, Chemistry, Analytical Chemistry +14