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Internal stress relaxation based method for elastic stiffness characterization of very thin films

Materials ScienceEngineeringMechanical BehaviorMechanicsInternal Stress RelaxationMechanical EngineeringApplied PhysicsElastic Stiffness CharacterizationStressstrain AnalysisElasticity (Physics)Solid MechanicsThin FilmsPhotoelasticityMechanics Of MaterialsHigh Strain Rate