Publication | Closed Access
The Melbourne proton microprobe
49
Citations
11
References
1979
Year
EngineeringNuclear PhysicsMicroscopyInstrumentation EngineeringDetector PhysicsMelbourne Proton MicroprobeAnalytical InstrumentationInstrumentationBiophysicsHigh-energy Nuclear ReactionRadiation DetectionPhysicsAccelerator Mass SpectrometryUltra‐high VacuumCosmic RayParticle Beam PhysicsProton MicroprobeMicrofabricationSpectroscopyMass SpectrometryDetector PhysicMicrobiologyMedicineTrace Elements
SUMMARY A scanning proton microprobe is described which operates in ultra‐high vacuum with a resolution of 10 μm. The operating principles and main features of the design are discussed and the ability of such an instrument to detect trace elements down to a few parts per million by mass is illustrated.
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