High cooling power density SiGe/Si micro-coolers

Abstract

SiGe/Si superlattice micro-coolers are investigated experimentally. They can be monolithically integrated with Si-based microelectronic devices to achieve localised cooling and temperature control. Cooling by as much as 4.2 K at 25°C and 12 K at 200°C was measured on 3 µm thick, 60 × 60 µm2 devices. This corresponds to maximum cooling power densities approaching kW/cm2.