Publication | Closed Access
Depth resolution in Auger depth profile analysis of aluminum metallization in microelectronics: The effect of crystalline texture
55
Citations
14
References
1990
Year
Materials EngineeringMaterials ScienceAluminum MetallizationEngineeringSurface ScienceApplied PhysicsMetallurgical InteractionMetal FormingMetallurgical SystemDepth ResolutionCrystalline TextureMicrostructureMetal ProcessingMetallography
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