Japanese Journal of Applied Physics · 2004 · 27 citations · 0 references
EngineeringMaterials EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsForce SensingMechanical SensorsMicroelectromechanical SensorsPressure SensorsSilicon MaterialsTactile SensingDifferential Pressure SensorsPiezoresistive Pressure SensingPiezoresistive Pressure SensorsPorous SiliconPressure SensingPressure SensitivityPressure Sensor SensitivitySensitivity
A novel differential pressure sensor has been developed with silicon beams embedded in a silicone rubber membrane. The transducer is usable for most applications involving exposure to harsh media. A piezoresistive differential pressure sensor using silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n+/n silicon substrates by a unique silicon micro-machining technique using porous silicon etching. The pressure sensitivity is about 4.75 mV/kPa and the non-linearity is less than 1.05% FS (full scale).