Diamond and Related Materials · 1996 · 32 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSensorsMechanical SensorsMems SensorsMicroelectromechanical SensorsNanosensorsPressure SensorsMicroelectromechanical Pressure SensorsPressure Sensing SystemsPressure Sensor Characterization
16
Piezoresistance Effect in Germanium and Silicon
Charles S. Smith · Physical Review · 1954 · 2K citations
Piezoresistancc effect in germanium and silicon
Charlie Smith · Physical Review D · 1954 · 497 citations
Hall Mobility in Chemically Deposited Polycrystalline Silicon
T. I. Kamins · Journal of Applied Physics · 1971 · 434 citations
Piezoresistance effect of silicon
Yozo Kanda · Sensors and Actuators A Physical · 1991 · 391 citations
Natural Sciences, Materials Engineering, Materials Science +7