Concepedia

Publication | Closed Access

Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature

DOI

18

Citations

26

References

2011

Year

Thomas Defforge, Xi Song, Gaël Gautier, Thomas Tillocher, Rémi Dussart, Sébastien Kouassi, François Tran‐Van
Sensors and Actuators A Physical

References

YearCitations

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