Cathodoluminescence and photoluminescence from chemical-vapor-deposited diamond

Abstract

Cathodoluminescence spectra from microwave-plasma-assisted chemical-vapor-deposited (CVD) diamond have been studied as a function of temperature at low electron energies. This investigation shows a pronounced difference between the luminescence spectra from CVD diamond films as grown and CVD diamond films annealed by rapid thermal processing at 1000 °C for one minute in an argon atmosphere. The relative intensities of the dominant features at 443 nm (2.8 eV) and 510 nm (2.4 eV) are very different for unannealed and annealed samples. We report measurements of the temperature dependence of these luminescence bands.