Applied Physics Letters · 2006 · 40 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceInterface ScienceSurface ChemistrySurface ScienceInterface EngineeringPlasma-surface InteractionsSurface AdsorptionSurface Chemistry Of SolidsSurface ModificationSurface PhysicsAdsorbate - Surface InteractionsAdsorption GeometryContact ResistanceInterface ResistanceMolecular AdsorptionMolecular PackingPlasma TreatmentResistivity
We report the reduction of contact resistivity between Au and pentacene by O2 plasma treatment. Contact resistance dramatically reduced from 5.65to0.22MΩcm by the treatment. O2 plasma treatment transformed Au to AuOx, increasing the surface energy from 45.1to71.5mJ∕m2. Molecular adsorption geometry of pentacene on AuOx changed from a planar structure to an upright type, improving crystallinity and molecular packing. Thus, defects and traps at the interface were reduced, decreasing the contact resistance between Au and pentacene.
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