Concepedia

Publication | Closed Access

Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis

DOI

15

Citations

5

References

1989

Year

P.L.F. Hemment, K.J. Reeson, A.K. Robinson, John A. Kilner, R.J. Chater, Christopher Marsh, K. N. Christensen, J.R. Davis
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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