Ultraviolet detectors in thin sputtered ZnO films

H. Fabricius, T. Skettrup, P. Bisgaard

Applied Optics · 1986 · 89 citations · 11 references

Concepts

Abstract

Ultraviolet-sensitive photodiodes have been made using the Schottky barrier formed in the contact layer between a thin sputtered layer of ZnO and Au. The sputtering parameters for the ZnO layer were optimized. The IV characteristics and the sensitivity spectra of the ZnO–Au photodiodes were investigated.

References

11