Applied Surface Science · 2008 · 69 citations · 21 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsAmorphous MaterialsChemical Vapor DepositionSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsAmorphous SiliconHydrogenated Amorphous SiliconSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Chemical Vapor DepositionSilicon Thin FilmsThin-film Semiconductors
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