Publication | Closed Access
Structural analysis and microstructural observation of SiCxNy films prepared by reactive sputtering of SiC in N2 and Ar
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Citations
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References
2000
Year
Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsStructural AnalysisSicxny FilmsStructural CeramicReactive SputteringThin FilmsChemical Vapor DepositionThin Film ProcessingCarbide
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