The laser-arc: a new industrial technology for effective deposition of hard amorphous carbon films

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

Natural Sciences, Materials Engineering, Thin Films +1

Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon

David R. McKenzie, David A. Muller, Bernard Pailthorpe · Physical Review Letters · 1991 · 955 citations

Natural Sciences, Materials Engineering, Materials Science +13

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

P. Fallon, V.S. Veerasamy, C. A. Davis et al. · Physical review. B, Condensed matter · 1993 · 886 citations

Natural Sciences, Materials Engineering, Materials Science +9

Subplantation model for film growth from hyperthermal species

Y. Lifshitz, S. R. Kasi, J. W. Rabalais et al. · Physical review. B, Condensed matter · 1990 · 592 citations

Natural Sciences, Materials Engineering, Materials Science +17

Deposition mechanisms for promoting sp3 bonding in diamond-like carbon

John Robertson · Diamond and Related Materials · 1993 · 530 citations

Natural Sciences, Materials Engineering, Materials Science +7