S. R. Kasi

Subplantation model for film growth from hyperthermal species

Y. Lifshitz, S. R. Kasi, J. W. Rabalais et al. · Physical review. B, Condensed matter · 1990 · 590 citations

Engineering, Preferred Orientation, Subplantation Model +18

Subplantation model for film growth from hyperthermal species: Application to diamond

Y. Lifshitz, S. R. Kasi, J. W. Rabalais · Physical Review Letters · 1989 · 509 citations

Materials Science, Ion Trajectory Calculations, Diamond-like Carbon +15

Inelastic processes in low-energy ion-surface collisions

S. R. Kasi, Hong Seok Kang, Craig S. Sass et al. · Surface Science Reports · 1989 · 190 citations

Low-energy Ion-surface Collisions, Engineering, Physics +4

Kinetics of silicon epitaxy using SiH4 in a rapid thermal chemical vapor deposition reactor

M. Liehr, C. Michael Greenlief, S. R. Kasi et al. · Applied Physics Letters · 1990 · 131 citations

Engineering, Surface Hydrogen, Chemistry +16

Mechanisms of copper chemical vapor deposition

Susan L. Cohen, M. Liehr, S. R. Kasi · Applied Physics Letters · 1992 · 106 citations

Materials Science, Organic Ligands, Chemical Engineering +13