Submicron structures in thin layers by electron beam lithography and ion beam sputtering - Concepedia

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Submicron structures in thin layers by electron beam lithography and ion beam sputtering

21

Citations

2

References

1997

Year

S. M. Chérif, J.-F. Hennequin

Journal of Magnetism and Magnetic Materials

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationSubmicron StructuresSurface ScienceApplied PhysicsIon Beam SputteringIon BeamThin FilmsMicroelectronicsNanolithography MethodElectron Beam Lithography

References

	Year	Citations

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