Thin Solid Films · 1979 · 32 citations · 14 references
Natural SciencesMaterials SciencePhysicsElectrochemistryElectronic MaterialsSemiconductor DevicesLow-temperature PlasmasOxidation-reduction ReactionsOxide SemiconductorsPlasma-surface InteractionsAnodic OxidationElectrochemical OxidationElectron KineticsPlasma OxidationPlasma-assisted OxidationPlasma-enhanced OxidationSemiconductor Oxidation
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