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Fabrication and reflection properties of silicon nanopillars by cesium chloride self-assembly and dry etching

Materials ScienceCesium ChlorideEngineeringMicrofabricationNanotechnologyNanomaterialsSurface ScienceApplied PhysicsDry EtchingSemiconductor Device FabricationSilicon NanopillarsSilicon On InsulatorMicroelectronicsPlasma EtchingNanolithography Method